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Impact of polymer film thickness and cavity size on polymer flow during embossing : towards process design rules for nanoimprint lithography.

机译：聚合物膜厚度和腔尺寸对压花过程中聚合物流动的影响：纳米压印光刻的工艺设计规则。

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Schunk, Peter Randall; King, William P. (Georgia Institute of Technology, Atlanta, GA); Sun, Amy Cha-Tien; Rowland, Harry D. (Georgia Institute of Technology, Atlanta, GA);
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1. Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography [J] . Rowland HD, Sun AC, Schunk PR, Journal of Micromechanics and Microengineering . 2005,第12期

机译：压花过程中聚合物膜厚度和空腔尺寸对聚合物流动的影响：朝着纳米压印光刻工艺设计规则的方向
2. Simulations of nonuniform embossing: The effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography [J] . Harry D. Rowland, William P. King, Amy C. Sun, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2005,第6期

机译：模拟非均匀压花：纳米压印光刻过程中不对称邻腔对聚合物流动的影响
3. Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology [J] . Ting CJ, Huang MC, Tsai HY, Nanotechnology . 2008,第20期

机译：纳米压印/热压印技术由聚合物低成本制造大面积减反射膜
4. Experimental Analysis and Numerical Simulation of the Flow Behaviour of Thin Polymer Films during Hot Embossing [C] . M. Sahli, T. Barriere, J-C Gelin International Conference on Numerical Methods in Industrial Forming Processes . 2010

机译：薄膜薄膜薄膜流动性能的实验分析与数值模拟
5. Photochemistry applied in optical lithography. Use of spectroscopic and imaging techniques for the characterization of chemical processes in thin polymer films [D] . Ivan, Marius Gabriel 2007

机译：光化学在光学光刻中的应用。使用光谱和成像技术表征聚合物薄膜中的化学过程
6. Design of Highly Photofunctional Porous Polymer Films with Controlled Thickness and Prominent Microporosity [O] . Cheng Gu, Ning Huang, Yang Wu, -1

机译：可控厚度和突出微孔性的高光功能多孔聚合物膜的设计
7. Simulations of non-uniform embossing:the effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography. [O] . Schunk, Peter Randall, King, William P. (Georgia Institute of Technology, Atlanta, GA), Sun, Amy Cha-Tien, 2007

机译：非均匀压花的模拟：非对称相邻腔对纳米压印光刻期间聚合物流动的影响。

Impact of polymer film thickness and cavity size on polymer flow during embossing : towards process design rules for nanoimprint lithography.

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